| 摘要 |
PURPOSE:To improve resolution, by obtaining an angle between a slit image and the aligning direction of elements based on the signal of a two-dimensional detecting element, adding the signals of a plurality of elements, which are arranged at neighboring positions in a one-dimensional pattern for every assembled group, and expressing an energy spectrum. CONSTITUTION:An electron beam 2, which has passed a sample 1, is inputted to an analyzer 4 through an input slit 3 and dispersed in correspondence with energy. An image SI is projected on the different position on a two-dimensional diode arrays 5. The signal of the array 5 is once stored in a memory device 9 from a central processing unit 7. Based on the detected signal, an angle theta between the slit image, which is projected on the array 5, and the Y axis is obtained. The picture is processed. The signal is synchronized with energy sweeping and supplied to a display device 10. Thus the spectrum with high resolution can be displayed. |
