| 摘要 |
PURPOSE:To provide the titled recording medium with rich lubricity, and to prolong the life of the medium by forming a protective film consisting of titanium nitride (TiN) on the surface of the magnetic layer of the vertical magnetic recording medium having an easy magnetization axis vertical to the film surface. CONSTITUTION:A high-permeability soft magnetic film 2a having 0.5mum thickness and consisting of Fe-Ni permalloy and a vertically magnetized film 3a having 0.3mum thickness and consisting of a Co-Cr film are successively formed on the surface of a high molecular flexible base 1a consisting of a polyimide film having 50mum thickness. After the inside of a chamber is then fully evacuated to a high vacuum of <=5X10<-7>Torr background pressure, gaseous Ar is introduced by 15mTorr, and titanium nitride (TiN) is sputtered at 200W electric power to form a titanium nitride film 7 having about 100Angstrom thickness on the vertically magnetized film 3a. Since the titanium nitride is skillfully utilized, the lubricity of the surface of the vertical magnetic recording medium can be increased, and the damage and abrasion of the surface of the recording medium and the magnetic head for vertical recording can be prevented. The corrosion resistance is also improved. |
