| 摘要 |
PURPOSE:To improve the heat resistance, resolution and sensitivity by adding a specified quinonediazido compound to an alkali-soluble resin. CONSTITUTION:This positive type photosensitive resin composition contains at least one kind of compound represented by the formula (where l is 0-3, m is 1-4, k is 1-4, k+l+m=5, n is 2-4, R1 is 1,2-naphthoquinonediazido-4-sulfonyl, 1,2-naphthoquinonediazido-5-sulfonyl or 1,2-benzoquinonediazido-4-sulfonyl, R2 is H, halogen, alkyl, aryl, aralkyl or the like, and Z is a residue of methane or an aromatic compound) by 5-100pts.wt. per 100pts.wt. alkali-soluble resin. |
