VERFAHREN ZUR VOLLAUTOMATISCHEN HANDHABUNG VON SUBSTRATSCHEIBEN IN EINER IONENSTRAHLAETZANLAGE,申请号DD19840264631-传众专利搜索

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发明名称	VERFAHREN ZUR VOLLAUTOMATISCHEN HANDHABUNG VON SUBSTRATSCHEIBEN IN EINER IONENSTRAHLAETZANLAGE
摘要
申请公布号	DD224878(A1)	申请公布日期	1985.07.17
申请号	DD19840264631	申请日期	1984.06.28
申请人	VEB HOCHVAKUUM DRESDEN,DD	发明人	SCHLENK,RAINER,DD;WESER,FRANK,DD;KURTH,KLAUS,DD
分类号	C23C14/50;(IPC1-7):C23C14/50	主分类号	C23C14/50
代理机构		代理人
主权项
地址

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