| 摘要 |
PURPOSE:To prevent the leakage of poisonous gas out of the titled apparatus, by a method wherein gas leakage is alarmed by sensing the gas leakage of a primary side gas supply piping or a gas flow controller by means of a gas leakage alarm, and gas supply from a gas bomb is shielded by operating an automatic shield valve. CONSTITUTION:A gas supply piping container 18 contains a primary side gas supply piping 13 to a gas flow controller 14 and is connected to an exhaust duct with a suction port 19, always making suction inside. Thus, the leakage of chlorine gas outside the apparatus at the time of leakage of the gas in said piping 13 and said controller 14 and the exposure of the operator to this gas are prevented. Further, a gas leakage alarm 20 senses gas leakage, setting an automatic shield valve 21 in action by emitting alarm signals, and then stops the supply of chlorine gas from the gas bomb; therefore, safety is much more enhanced, countermeasurements and repairs after sensing of gas leakage can be rapidly made. |
