| 摘要 |
PURPOSE:To attain enlargement, improvement of productivity and mass production of the title films by a method wherein an active compound containing germanium and halogen as well as another compound produced from an oxygen contained filming compound are separately fed to a filming space to form said films by means of chemically reacting them to each other. CONSTITUTION:An active compound A produced by decomposing a germanium and halogen contained filming compound as well as another active compound B produced from an oxygen contained filming compound chemically reacting to the former are separately fed to a filming space to form the title films on a substrate by means of making them chemically react to each other. The life of applicable active compound A is recommended to exceed 10 seconds in terms of productivity and easy handling while e.g., GeF4 etc. may be recommended for the germanium and halogen contained compound. Likewise a compound comprising single substance of oxygen such as O2, O3 as well as oxygen and one or exceeding two kinds of atoms other than oxygen may be recommended for the oxygen contained compound. Finally the preferable weight ratio of active compounds B and A may be 8:2-4:5. |
