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发明名称
PRAEZISIONSBEWEGUNGSVORRICHTUNG
摘要
申请公布号
DE3446967(A1)
申请公布日期
1985.07.04
申请号
DE19843446967
申请日期
1984.12.21
申请人
CANON K.K.
发明人
SUZUTA,MIKIO;YAMAMOTO,HIRONORI;NAKAZAWA,KAZUO
分类号
H01L21/30;B23Q1/26;B23Q1/28;G03F7/20;G03F9/00;G12B3/08;G12B5/00;H01L21/027;H01L21/67;H01L21/68;(IPC1-7):G12B1/00
主分类号
H01L21/30
代理机构
代理人
主权项
地址
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