| 摘要 |
PURPOSE:To obviate decrease in dimensional accuracy as a result of the influence of temp. and humidity that a mask material receives by providing a dielectric layer via a strippable conductor mask layer or release layer on a transparent base. CONSTITUTION:A dielectric layer 3 is provided via a trippable conductor mask layer or strippable layer 2 on one surface of a transparent base 1. The dielectric layer is provided directly on the surface of the base of which the surface resistance value is 10<1>-10<18>OMEGA/cm<2>, more preferably 10<4>-10<9>OMEGA/cm<2> and the volume resistance value is 10<1>-10<20>OMEGAcm, more preferably 10<4>-10<10>OMEGAcm. The mask layer provided with the strippable layer and laminated thereon with the dielectric layer via the low resistance layer having 10<1>-10<10>OMEGA/cm<2> surface resistance value thereon is provided on one surface of the base 1. A low resistance layer 4 may be provided on the other surface of the base 1. |
