| 摘要 |
<p>PURPOSE:To obtain a color filter free from deterioration in color characteristic owing to absorption of moisture and oxidation by depositing partially prescribed metal or alloy film by evaporation on a prescribed transparent base plate and subjecting the films to a heat treatment in a prescribed atmosphere to diffuse thermally elements in the films into the base plate. CONSTITUTION:A photoresist film 2 is coated on the surface of a sapphire, quartz or glass base plate 1 and is partially exposed and developed to window the film and a metallic film 3 consisting of Fe, Cr, Co, etc. is formed thereon. The film 2 and the metallic film thereon are removed. Metallic films 4, 5 are formed by repeating the above-mentioned operation with other metals. The films are heat-treated in an atmosphere of nitrogen or steam, etc. to diffuse the elements of the films 3-5 into the plate 1 and to form color center layers 6-8. The unnecessary metallic films are removed. The color filter free from deterioration in color owing to absorption of moisture and oxidation is thus obtd.</p> |
