摘要 |
PURPOSE:To prevent the state of pressure reduction inside the container during no operation of semiconductor devices and the like by a method wherein the titled container is so constructed that at least one of partitions in contact with the outer air is made movable to the cooling medium side and its opposite side. CONSTITUTION:Semiconductor elements 2 and a coolant 3 that cools them are sealed in the titled container 1. On the stop of the element action, the vapor pressure of the coolant decreases, the inside of the container turning into pressure reduction, and the partition 4 being then moved spontaneously to the coolant side with this change. As the result, the space 5 in the container is reduced, and finally the whole inside the container is filled with the coolant. In the state of the partition and the coolant as shown in the figure, a sealing part prevents the leakage of impurities such as air from outside even if they are weak. |