| 摘要 |
PURPOSE:To measure various characteristics of wafer using monitor chip while executing function test of product chips in the same process by providing, to a monitor chip, a discriminating means which can discriminate difference from the product chip and forming the layout of pad in the same way as that of product chip. CONSTITUTION:Another pad 26 having the same layout as the pad 22 of product chip 21 is formed around the pad 25 which is the actual pad of a monitor chip 24, and each pad 26 is adequately connected to the practical pad 25 of the monitor chip with an Al wire 27. Moreover, this monitor chip 24 is provided with a discriminating means, namely a circuit for discriminating monitor chip from the chip group in the wafer. A semiconductor integrated circuit wafer having such constitution carries out the test check in the wafer test process as explained below. Namely, a chip is discriminated whether it is a monitor chip or product chip. When it is a monitor chip, characteristic is measured and when it is a product chip, function test is carried out. Measured data is respectively fed back. |
