| 摘要 |
PURPOSE:To enable not to differ the shape of a pattern edge according to directions by a method wherein, when the substrate to be drawn is being irradiated with electron beams, the irradiation is interrupted in every prescribed unit hour and the drawing pattern is constituted of unit dots. CONSTITUTION:A deflection electrode 116 is synchronized to a synchronous signal, which is sent from a synchronous circuit 123, deflects periodically electron beams and makes the electron beams scan on a substrate 110 to be drawn. A blanking electrode 115 is made an ON-OFF control by a blanking circuit 125 according to the pattern of a pattern memory 126 for drawing. A dot blanking control circuit 128 makes the irradiation of the electron beams interrupt in every constant hour during a time when the electron beams are being irradiated and controls the electrode 115 in such a way that the scanning lines of the electron beams are formed ina dotted pattern. According to this constitution, the rectangular pattern is drawn in such a way as to formed of unit patterns in a dotted condition. Accordingly, it is eliminated that the shape of the patternedge is different in the X direction and the Y direction. |
