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发明名称
플라즈마 현상층을 사용한 형판 제작방법
摘要
내용 없음
申请公布号
KR850002672(A)
申请公布日期
1985.05.15
申请号
KR19840005642
申请日期
1984.09.15
申请人
null, null
发明人
래리 에드워드 스틸웨건 (외 3)
分类号
H01L21/027;G03F7/26;G03F7/30;G03F7/36;G03F7/38
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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