FORMATION OF ORGANIC THIN FILM

摘要

PURPOSE:To form a strong film not containing a three-dimensionally crosslinked polymer at a high speed, by irradiating an org. compound with laser beam with a predetermined wavelength in vacuum and scattering the same to form a thin film to the surface of a substrate. CONSTITUTION:A laser oscillating apparatus 1 for oscillating laser beam 2 with a wavelength of 190-400nm having energy corresponding to the chemical bonding energy of an org. compound coming to an evaporation source is prepared. Subsequently, laser beam 2 oscillating from said apparatus 1 is allowed to irradiate the org. compound 8 provided in a vacuum tank 3 and the org. compound 8 is scattered to form the thin film of the org. compound on the surface of a substrate.