| 摘要 |
PURPOSE:To eliminate the deformation of a load-unload shaft even at the operation after abnormal state by detecting the stress of the load-unload shaft so as to stop the movement of a sample holder when the detected value is over the predetermined value. CONSTITUTION:A roller 19 is held by a leaf spring 16 which contacts with a load-unload shaft 12 and is fixed at a bearing 15. A strain gage 17 is attached to this leaf spring and the output of it is outputted the outside through a leading wire 18 and a hermetic seal 20. When the force W or W' is applied to the load- unload shaft, the output sigma of the strain gage 17 changes as shown in the drawing and if it is within the range of limit of permanent strain H of the load-unload shaft, the shaft can restore when the force is removed even if W is applied or if a deformation is produced. Accordingly, the permanent deformation of the load-unload shaft can be prevented by stopping urgently the drive motor for moving a sample holder if the output over the range of H is generated. |
