发明名称 Method for producing multilayered glass-ceramic structure with copper-based conductors therein
摘要 A method for producing a multilayered glass-ceramic structure with copper-based conductors therein, includes firing a multilayered structure, in which copper-based patterns and glass-ceramic layers are alternately laminated, in an inert atmosphere containing water vapor, the partial pressure of which is from 0.005 to 0.3 atmosphere. The temperature multilayered structure is fired at a temperature at which a thermally depolymerizable resin binder, contained in the glass-ceramic green sheets, is depolymerized and eliminated, but its glass components and the copper exhibit substantially no change in their state. The method also includes raising, in an inert atmosphere without water vapor, the firing temperature at which particles of the glass components coalesce, but the metallic state of copper is not affected.
申请公布号 US4504339(A) 申请公布日期 1985.03.12
申请号 US19830502598 申请日期 1983.06.09
申请人 FUJITSU LIMITED 发明人 KAMEHARA, NOBUO;KURIHARA, KAZUAKI;NIWA, KOICHI
分类号 H05K3/46;B32B15/04;H01L21/48;H01L23/15;H01L23/498;H05K1/03;H05K3/16;(IPC1-7):C03B29/00;C04B33/34;C04B37/00 主分类号 H05K3/46
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