发明名称 SEMICONDUCTOR DEVICE
摘要 PURPOSE:To reduce the resistance of a semiconductor device and to integrate the device by forming the same metal silicide layers on the surface of a P type impurity diffused region and an N type impurity diffused region. CONSTITUTION:A high density P type impurity is diffused in a region 12 on the (100) surface of a P type silicon substrate 1, and an N type impurity is diffused in a region 13. High melting point metal silicide layers such as Ti silicide layers 14 are formed on the surfaces of the regions 12, 13. When thus constructed, the layer resistances of the layers 12, 13 can be reduced without deteriorating the characteristics of the diffused regions.
申请公布号 JPS6041259(A) 申请公布日期 1985.03.04
申请号 JP19830149879 申请日期 1983.08.17
申请人 NIPPON DENKI KK 发明人 KIKUCHI MASANORI;MIHARA SEIICHIROU;MURAO YUKINOBU
分类号 H01L29/43;H01L21/28;H01L29/45;(IPC1-7):H01L29/46 主分类号 H01L29/43
代理机构 代理人
主权项
地址