| 摘要 |
PURPOSE:To eliminate reduction in heat efficiency caused by formation of impurities resulting from unbalance of temperature distribution in a furnace, by setting heat-shielding plates and reaction pipes traveling in the longer direction and rectangular direction in the reaction furnace. CONSTITUTION:The reaction furnace 1 having the two top and and bottom heating planes 2 in parallel is equipped with the plural reaction pipes 3 having the hydrocarbon inlets 4 at one end, the formed gas outlets 5 at the other, and the built-in substrates 9 in such a way that they can be transferred in the longer direction and rectangular direction, and provided with the heat-shielding plates 6 passing through the reaction pipes 3, transferring with the reaction pipes at the side of the reaction furnace 1. The reaction pipes 3 are inserted into the reaction furnace 1 heated at 1,100-1,150 deg.C by the nichrome wire 8, an Ar gas is introduced to the reaction pipes 3 at a temperature <=1,000 deg.C, a H2 gas is fed to them at a temperature 1,000-1,120 deg.C, a mixed gas of a hydrocarbon gas and the H2 gas is introduced at >=1,120 deg.C, and carbon fiber is formed while the reaction pipes 3 are transferred. |
