| 摘要 |
PURPOSE:To obtain a humidity sensor excellent in water resistance and solvent resistance, impervious to smoke, having good steam permeability and enhanced in response and durability, by forming a polycyano p-xylylene protective film to the surface of a humidity-sensitive membrane. CONSTITUTION:A comb shaped electrode is preliminarily provided on a substrate comprising alumina ceramics and an inorg. humidity-sensitive membrane or a humidity-sensitive membrane comprising an org. polymer having a hydrophilic group is formed on said electrode. In the next step, a polycyano p-xylylene film with a thickness of 0.5-1mum is formed as a protective film for covering said humidity-sensitive membrane by a method wherein dicyano-di-p-xylene is thermally decomposed into a monomer which is, in turn, uniformly vapor deposited and polimerized on the humidity-sensitive membrane. This film is high in water resistance, solvent resistance and heat resistance as compared with a conventional film and a sensor excellent in durability is obtained. |
