| 摘要 |
PURPOSE:To obtain a stable oxygen electrode by using a specific flat plate structure composed of an insulating substrate, a precious metal conductive layer and an insulating member as a cathode unit or a measuring electrode unit. CONSTITUTION:A layer of platinum or gold 15 which becomes a cathode is formed on an insulating substrate 14 having holes 22 for connecting lead wires, and a flat plate structure is formed by providing an insulating layer 16 bored with holes 17 for contacting with electrolyte, of which sensor is adjusted so that it has a proper responsiveness on the layer of platinum or gold and it is used as a measuring electrode or cathode. The manufacture of such an insulating substrate can be relatively easily accomplished by silicon IC technique. A substrate formed by using a silicon substrate 23 is cut into the unit of chip and as the chip is heated, an insulating film of SiO2 is formed on the surface, being oxidized, while platinum and gold are not oxidized, and an insulating substrate can be obtained. By this method, a stable oxygen electrode can be obtained. |
