| 摘要 |
PURPOSE:To execute a measurement irrespective of a gas, a liquid and corrosive properties by providing a base having a flaky diaphragm, a cylindrical fitting-in member having a pressure leading-in port, and a recessed part for receiving said fitting-in member, etc. CONSTITUTION:A semiconductor pressure sensor consists of a tip base 20, a flaky diaphragm 21, a mount base 22, an electrode plate 23 and a ceramic cap 24. The tip base 20 is cylindrical, and a pressure leading-in port 20-1 and a circular recessed part 20-2 for receiving the diaphragm 21 are formed on the center part and the lower face, respectively. The circular recessed part 20-2 is concentrical with the pressure leading-in port 20-1, and its depth is equal to or slightly shallower than the thickness of the diaphragm 21. A circular recessed part 22-1 for receiving the electrode plate 23 is formed on the lower face of the mount base 22. According to such constructions, a measurement can be executed irrespective of a gas, a liquid and corrosive properties. |
