| 摘要 |
PURPOSE:To increase bonding force between a substrate and an active material thin film and form a positive electrode having good electrochemical performance of a thin film battery by arranging a titanium oxide layer between a TiS2 thin film which is a positive active material and a substrate. CONSTITUTION:A titanium oxide layer 2 such as TiO2 amorphous film is formed on a substrate 1 comprising, for example, borosilicate glass by spattering. A TiS2 thin film 3 which is positive active material is formed thereon by a CVD method. Thereby, the substrate 1 and the TiS2 thin film is strongly bonded and electrochemical performance of a positive electrode is remarkably improved. |
