| 摘要 |
PURPOSE:To obtain an output of a laser beam mode of an excellent symmetry by mounting an aperture member, to the outer circumference of an opening section thereof a plurality of temperature detecting elements are fitted, and measuring the temperature distribution of the periphery of the aperture member. CONSTITUTION:Groove sections 72 are formed to the outer circumference of an opening section 71 in an aperture member 70, and thermocouples 73 are mounted. When a partial reflecting mirror 5 and a totally reflecting mirror 6 are aligned deflectively, laser beams 9 and the center of the aperture member 70 are displaced, and temperature distribution is generated in each section of the aperture member 70. Accordingly, the mutual opposite positions of the partial reflecting mirror 5 and the totally reflecting mirror 6 are adjusted so that outputs from the thermocouples 73 are equalized by an adjusting means, and the laser beams 9 of a mode of an excellent symmetry can be generated. |
