摘要 |
PURPOSE:To detect leakage easily by containing the instrument in a vessel airtightly so that only the opening side of a tube plate of tubes is exposed, compressing the inner part of the vessel with gaseous helium and measuring the gaseous helium leaked to the opening side of the tube plate from the vessel. CONSTITUTION:The instrument 1 is contained airtightly in the vessel so that only the opening side of the tube plate 9 of the tubes 12 is exposed, the inner part of the vessel is compressed with the gaseous helium, and the gaseous helium leaked to the opening side of the plate 9 from the vessel is measured. If there is a defect part leaking the compressed gaseous helium at the part connecting the thin tube 12 and the plate 9, the gaseous helium leaked from the defect part is measured by a helium mass spectrometer 14 and the existence of the leak part can be confirmed easily. |