发明名称 Silicon ribbon growth wheel and method for heat flow control therein
摘要 A silicon ribbon growth wheel having a thermal resistance zone between an outer silicon contacting surface and an inner cooling fluid contacting surface to control rate of heat flow from the outer to inner surfaces. In a preferred form the thermal resistance zone is defined by a row of holes through the wheel near the outer surface with said holes isolated from the cooling fluid. A method for controlling the heat flow is also diclosed.
申请公布号 US4468281(A) 申请公布日期 1984.08.28
申请号 US19820453843 申请日期 1982.12.27
申请人 ATLANTIC RICHFIELD COMPANY 发明人 BENDER, DAVID L.;REA, SAMUEL N.
分类号 C30B11/00;C30B29/64;(IPC1-7):C30B19/02;C30B29/06;C30B35/00 主分类号 C30B11/00
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