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发明名称
MICROWAVE PLASMA DEVICE
摘要
申请公布号
JPS59114798(A)
申请公布日期
1984.07.02
申请号
JP19820223925
申请日期
1982.12.22
申请人
SHIMADA RIKA KOGYO KK
发明人
SHIROYAMA KIYOSHI
分类号
H05H1/46
主分类号
H05H1/46
代理机构
代理人
主权项
地址
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