| 摘要 |
PURPOSE:To improve a durability, reduce the difference of a selective absorption property due to the thickness of the film and widen the proper range of the thickness of the film comparatively by a method wherein a cermet film, consisting of the mixture of plating metal and the oxide of the metal, is formed on the surface of a material to be plated under an oxygen atmosphere or the mixed atmosphere of oxygen gas and an inert gas. CONSTITUTION:A metal, selected from a group consisting of tungsten, tantalum, molybdenum, niobium, zirconium, and hafnium, is employed for the plating metal, therefore, the cermet film, excellent in the heat-resisting property, is formed. The thickness of the cermet film is preferably 30-20nm. A transparent oxide film is formed by reactive deposit, reactive spattering, reactive ion plating or the like and is the film of an oxide selected from a group consisting of the oxide of the plating metal, aluminum oxide, silicon oxide, chrome oxide, nickel oxide, tin oxide, cobalt oxide and indium oxide while the thickness thereof is 100nm. |
