| 摘要 |
PURPOSE:To eliminate the limitation for the thickness of a nonmagnetic film which is formed between multilayered magnetic films and securing application of a plating process by providing a magnetic shunt layer at the side edge part of the multilayered magnetic film. CONSTITUTION:For instance, ''Permalloy'' is plated about 1mum on an entire surface of a plating base 10 as a magnetic film 11, and then copper, gold, nickel- phosphorus alloy or rhodium is plated about 0.1mum on the film 11 as a nonmagnetic film 21. Then magnetic films 12-14 and nonmagnetic films 22-23 are plated in th same processes, and a photoresist layer 6 of a prescribed pattern is formed on the multilayered film. Then ''Permalloy'', for instance, is plated to the side wall surface where the multilayered film is exposed to form magnetic shunt layers 31 and 32. In this case, the thickness of the layers 31 and 32 is set equal to or larger than that of films 11-14 to ensure the satisfactory transmission of the magnetic flux. |
