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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS5958838(A)
申请公布日期
1984.04.04
申请号
JP19820168355
申请日期
1982.09.29
申请人
HITACHI SEISAKUSHO KK
发明人
TAMAOKI YOUICHI;SHIBA TAKEO;SAGARA KAZUHIKO;KAWAMURA MASAO
分类号
H01L21/302;H01L21/3065;H01L21/331;H01L21/76;H01L21/762;H01L21/763;H01L29/73
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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