| 摘要 |
PURPOSE:To automate and simplify decision, and to improve accuracy by numbering the surfaces of pellets formed to a wafer and reading and memorizing the numbers of pellets decided as acceptable ones or defective ones on the check of characteristics. CONSTITUTION:A large number of the pellets 2 are formed to the semiconductor wafer 1 in a latticed shape. When electrodes 7 are formed to each pellet 2, the numbers 10 are formed continuously at the proper positions of each pellet 2. Acceptable pellets of defective ones are decided in the water 1 by bringing a measuring probe for checking characteristics into contact with the electrodes 7 of each pellet 2 and inputting predetermined signals. In this case, the numbers 10 given to the pellets 2 are read by a recognizer, and memorized by a storage device. When the wafer 1 is divided and several pellet 2 is obtained, only acceptable pellets 2 are discriminated according to contents memorized to the storage device. |
