| 摘要 |
PURPOSE:To improve both magnetic characteristics and adhesion efficiency, by performing the after-vapor deposition within a small range of incident angles after carrying out the pre-vapor deposition to a substrate with a high incident angle so that >=50% deposited area is obtained to the total area. CONSTITUTION:A base material 4 is shifted through guide rolls 2a and 2c along the surface of a cylindrical rotary scan 10 the inside of which is cooled when necessary. Then a ferromagnetic material is eaporated by the vacuum vapor deposition, etc. through a vapor deposition source 9, and the current is deposited to an effective surface within a projection angle between the roll 2c of the traveling material 4 and a mask 6. The pre-vapor deposition section covers >=50% deposition effective area within a comparatively high incident angle range for a linear substrate traveling part between the position where the substrate 4 is first separated from the roll 2c and the position where the substrate 4 first touches the can 10. Then the after-vapor deposition is carried out along the surface of the can 10 and up to the position of the minimum incident angle that is prescribed by the mask 6. |
