发明名称 FLOW CONTROLLER
摘要 PURPOSE:To ultrahigh-speedily transfer fine particles by providing a transforming means wherein the sharp end part of a wedge shape is directed toward the upstream side of a stream at the downstream side of a contracted and enlarged nozzle arranged on a flow path and constituting a flow controller for fine particles. CONSTITUTION:Both a base material 4 collecting fine particles and a vacuum pump 5 generating pressure difference are arranged in a downstream chamber 3 and furthermore a transforming means 6 having a wedge shape is provided on a flow path between a contracted and enlarged nozzle 1 and the base material 4 so that a sharp end part 6a is directed toward an upstream side against a stream. When jetting fine particles together with carrier gas as the ultrahigh- speed stream in a definite direction through the contracted and enlarged nozzle 1, the stream of fine particles is straightly advanced while keeping a jet and turned into beams. The sharp end of the conical wedge is directed toward the upstream side and arranged in the center of the beams and thereby the stream of fine particles is diffused along the slanted surface of the cone and fine particles are annularly stuck on the base material 4.
申请公布号 JPS62221442(A) 申请公布日期 1987.09.29
申请号 JP19860064260 申请日期 1986.03.24
申请人 CANON INC 发明人 SUGATA MASAO;SUGATA HIROYUKI;KIMURA TOSHIAKI;KURIHARA NORIKO;DEN TORU
分类号 B01J19/08;B01J3/02 主分类号 B01J19/08
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