| 摘要 |
PURPOSE:To improve yield of a magnetic head and its reliability, by forming a substance whose coefficient of thermal expansion is similar to a magnetic film and whose hardness is equal to it or above, on the magnetic film, by a thin film forming technique, and using it as a protecting film. CONSTITUTION:On a non-magnetic substrate 1, a ''Sendust '' film 2 is formed by means of spattering, which is formed into the first magnetic film. By use of a diamond cutting tool, a V-shaped groove 10 is formed on the sendust film 2, and one inclined face of the groove is made a gap face. SiO2 3 is made to adhere to thickness of 0.3mum, which becomes a gap spacer material. Also, the second Sendust film 4 is made to adhere by means of spattering. Subsequently, the second Sendust film 4 is removed to a U-shaped groove 11 up to the SiO2 film 3 by use of the diamond cutting tool. Subsequently, an Al2O3 film 9 is formed by use of a high speed magnetron spattering device, which is made a protecting film. |
