| 摘要 |
<p>PURPOSE:To effectively remove easily adsorbable components at the time when desorption process is ended as well as keep the purity of product gas at a high level even when the desorption process is switched to adsorption process. CONSTITUTION:During the period the step 1 in which adsorption is made in the first adsorption tower 1 and desorption is made in the second adsorption tower 2 is transferred to the step 3 in which desorption is made in the first adsorption tower and adsorption is made in the second adsorption tower, a process as the step 2 in which the pressures of the first and second adsorption towers 1 and 2 are equilibrated is inserted. In the step 2, adsorbed gas is introduced into the bottom of the second adsortpion tower 2 through a valve 19 and a check valve 20 from the top of the first adsorption tower 1 in the pressurized state in the adsorption process, and at the same time gas already stored in the product tank 8 is introduced (circulated) to the top of the second adsorption tower 2 through the valve 10.</p> |
