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发明名称
HEATING FURNACE
摘要
申请公布号
JPS58106384(A)
申请公布日期
1983.06.24
申请号
JP19810203460
申请日期
1981.12.18
申请人
TORAY KK
发明人
FUKUHARA MOTOTADA;ONO KEIZOU;MORITA KENICHI
分类号
H05B3/10;F27B17/00;F27D11/02;H01L21/22;H05B3/14
主分类号
H05B3/10
代理机构
代理人
主权项
地址
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