| 摘要 |
PURPOSE:To enable the measurement of spectroscopic value of soft X ray regardless of X rays radiated in pulse and continuously radiated by measuring kinetic energy and quantity of photoelectrons released when X ray to be measured irradiates oxygen. CONSTITUTION:A metal substrate 2 is cooled sufficiently with a cooler 3 full of a liquid helium or the like so that an oxygen adsorbed layer 4 will be formed on the surface thereof. When X ray 1 to be measured irradiates the layer 4, photoelectrons 5 are released therefrom. The photoelectrons 5 are introduced into a kinetic energy discriminator 6 to measure kinetic energy thereof along with the quantity thereof, which provides a spectrum with the kinetic energy corresponding to the wavelength of the X ray and the quantity of photoelectrons corresponding to the luminous intensity thereof. Thus, the spectroscopic value of the X ray is measured. These measurements are conducted in a vacuum vessel 7 to prevent absorption of X ray and scattering of photoelectrons due to air. |
