PLASMA ETCHING METHOD,申请号JP19810156137-传众专利搜索

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发明名称	PLASMA ETCHING METHOD
摘要
申请公布号	JPS5858281(A)	申请公布日期	1983.04.06
申请号	JP19810156137	申请日期	1981.10.02
申请人	NIPPON DENSHIN DENWA KOSHA	发明人	KIMIZUKA MASAKATSU;HIRATA KAZUO
分类号	C23F4/00;C23F1/00	主分类号	C23F4/00
代理机构		代理人
主权项
地址

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