摘要 |
PURPOSE:To obtain a monitor resistance without increasing the number of manufacturing processes, by forming a polishing monitor resistance with an adhering layer which adheres a conductor layer forming a winding of a magnetic core. CONSTITUTION:The 1st insulated layer 2 of SiO2, etc. is formed on a ferromagnetic substrate of ferrite, etc., and an adhering layer 3 is formed with a conductor of Ti, etc. A conductor layer serving as a winding is formed on the entire surface of the layer 3, and then only the conductor layer serving as a winding is selectively etched to give the simultaneous working to the areas of both winding 4 and lead wire 5 of a polishing monitor resistance. Then the layer 3 is removed excepting the area which serves as a monitor resistance 6 between two lead wires 5. Thus the polishing monitor resistance 6 is obtained. Then the 2nd insulated layer 7 of SiO2, etc. is formed on the resistance 6 and the winding 4, and a ferromagnetic layer 8 of ''Permalloy '', etc. is formed by a plating process, a vapor deposition process, etc. Thus a magnetic core is obtained. |