| 摘要 |
PURPOSE:To observe a microscopic defect on a specular surface to be inspected, easily and with high sensitivity, by irradiating a parallel luminous flux to the specular surface to be inspected, at a low incident angle from plural directions of its circumference. CONSTITUTION:A light from a light source 13 provided in a lower casing 11 like a case is converted to a parallel luminous flux through a Fresnel lens, is made incident to a plane mirror 18 placed so as to surround a sample base 14 from 4 directions, and illuminates a specular surface body 15 to be inspected, from 4 directions so as to satisfy the dark field condition. When the reflected rays are observed through a perspective window 16, a microscopic defect is observed through an incident light beam of a low incident angle from 4 directions in the dark field, therefore, the microscopic defect is observed easily and with high sensitivity. |
