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发明名称
ETCHING DEVICE USING HIGH FREQUENCY SPUTTERING
摘要
申请公布号
JPS57152471(A)
申请公布日期
1982.09.20
申请号
JP19810038207
申请日期
1981.03.17
申请人
CITIZEN TOKEI KK
发明人
SHIROTA TOSHIMITSU
分类号
C23F4/00;C23F1/08
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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