| 摘要 |
PURPOSE:To prevent the falling of a wafer due to the softening of a boat at the time of a high temperature by mounting a vertically movable base into a longitudinal cylindrical furnace body, hanging the boat on a strut on the base and maintaining the wafer into a holding groove in the boat in a stepped manner. CONSTITUTION:A connector 8 is engaged with a hook-shaped supporter 15 on the holder P side, using a semicylindrical cover 9 for the boat B as an outside surface, and the boat B is hung down from a holder P. Unified both B and P are turned by a shaft 12 at the lower end of the holder P by a motor M on thc outside of a furnace, and driven vertically by a shaft S and an arm A. The boat B in which wafers W are maintained is heated to 1000 deg.C or more in a furnace body 1. Since the boat B is suspended and supported to the holder P, it is not curved, and the slip-off and falling of the wafers W can be prevented. |
