| 摘要 |
PURPOSE:To increase the magnetic characteristics without lowering the depositing speed, by using the specific gas atmosphere when Co or the Co alloy is vapor- deposited in the vacuum state onto a substrate. CONSTITUTION:When a ferromagnetic material 6 of Co, etc. is vapor-deposited in the vacuum state onto a substrate 5 within a bell jar 1, both gaseous nitrogen and gaseous oxygen are put into the jar 1 in a range of 1-1,000 in terms of the has ratio (N2/O2) plus in a range of 20-6,700mu/minute/Torr in terms of the depositing speed/oxygen gas pressure. |
