发明名称 |
Turbomolecular vacuum pump having virtually zero power magnetic bearing assembly with single axis servo control |
摘要 |
A turbomolecular vacuum pump utilizes a virtually zero power magnetic bearing assembly with a single axis sevo control and has an optimized L/D ratio and an optimized number of pole faces. In such a structure, radial stiffness is low and radial damping is high so that single axis control is possible. A frusto-conical mechanical bearing structure is shown as a fail-safe back-up for the magnetic suspension system taught.
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申请公布号 |
US4312628(A) |
申请公布日期 |
1982.01.26 |
申请号 |
US19790040893 |
申请日期 |
1979.05.21 |
申请人 |
CAMBRIDGE THERMIONIC CORPORATION |
发明人 |
YAMAMURA, AKIRA |
分类号 |
F04D19/04;F16C39/06;(IPC1-7):F04B35/04;F16C35/00 |
主分类号 |
F04D19/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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