| 摘要 |
<p>PURPOSE:To reduce cost for manufacturing of a mask for a high-density circuit, by placing a brazing foil between a metallic foil and a reinforcing sheet of the same material and joining them together by heating and pressing them in a reductive or inactive atmosphere. CONSTITUTION:Such a brazing material as a silver foil 6 is placed in such a manner as to be caught between such a reinforcing sheet 1 as an Mo sheet, which is provided with a hole for forming of a mask pattern, and a mask material 4 made of an Mo foil. This is heated in a hydrogen furnace at 950 deg.C for 30min and joined by being pressed using a pressing jigs 5 and 5' made of ceramic material. After joining the mask material 4 with the reinforcing sheet 1, the Mo foil and the silver foil are etched for formation of a mask pattern. It is possible, by doing so, to simplify and facilitate joining of the reinforcing sheet 1, and therefore, cost for manufacturing of reinforced metal mask becomes able to be reduced.</p> |
