| 摘要 |
PURPOSE:To improve a working accuracy by focusing a focal point on the body to be worked by the irradiation light irradiating the body to be worked by transmitting a dichroic mirror and lens and finding the optimum conditions of a laser light based thereon. CONSTITUTION:The dislocation between a focal position and the target focal position by a laser light is observed in advance by the illuminating light for observation and the value thereof is stored in a CPU 22. The dislocation is corrected by actuating the driving device 12 in Z direction and a shutter 10 is opened via a shutter control device 11 to irradiate a laser light on the body to be worked. With this composition, highly accurate work can be done. |
