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发明名称
CRYSTAL PULLING UP DEVICE
摘要
申请公布号
JPS5692193(A)
申请公布日期
1981.07.25
申请号
JP19790169218
申请日期
1979.12.27
申请人
TOKYO SHIBAURA ELECTRIC CO
发明人
INOUE SHIYOUICHI;TERAJIMA KAZUTAKA
分类号
C30B15/00;H01L21/02;H01L21/208
主分类号
C30B15/00
代理机构
代理人
主权项
地址
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