DEVICE FOR HEAT INFLUENCE COMPENSATION IN THE ADJUSTING AND ILLUMINATING APPARATUS

摘要

1534450 Cooling exposing apparatus ELEKTROMAT VEB 16 Aug 1977 [17 Aug 1976] 34360/77 Heading G2A Exposing apparatus especially for use in the production of microelectronics has a stencil 3 located between a light source and a mounting 1 for a photo-sensitive substrate (not shown), both the stencil 3 and the mounting 1 being cooled by a thermostatically controlled device. As shown, mounting 1 is cooled by circulating fluid under the control of a thermostat 5. Stencil 3 is cooled by gas supplied by a nozzle 14. The temperature of the gas is controlled by a thermostat 9 and by a control unit 7. Unit 7 receives an input from a sensor 6 and from a shutter 13, since the temperature rises when the shutter opens.