摘要 |
PURPOSE:To enhance degasification efficiency by equipping a flow path plate provided with a continuous curved groove on one face, a diffusion plate having an aperture mirror-symmetrical to the groove and a gas permeable membrane pinched between these plates which are set mirror symmetrically. CONSTITUTION:A flow path 16 wherein holes 13 are joined with a continuous curved groove 12 and this groove reaches an outlet 15 from an inlet 14 is carved on a flow path plate 11. Further a groove 26 fitted with holes mirror- symmetrical to the flow path plate 11 is carved on a diffusion plate 21 and both the flow path 16 and the groove 26 fitted with holes are superposed in such arrangement that both are opposed and a gas permeable membrane 31 is pinched between both and airtightly sealed with an O-ring 32. The flow path 16 reaching a conduit 34 from a conduit 33 is surrounded with only the membrane 31 and the membrane 31 of this part communicates with counterbores 29 and therefore dissolved gas is foamed herein and efficiently deaerated. |