STRUCTURE OF FURNACE CORE TUBE FOR SEMICONDUCTOR DIFFUSION

摘要

PURPOSE:To prevent gas leakage by providing cooling fins at a branch tube section at a gas induction side such as SiC or the like wherein a temperature at a junction section with a quartz glass tube is decreased to avoid thermal expansion. CONSTITUTION:Many fins 3 are provided at the end section 2 of the gas tube entrance side of a furnace core tube 1 made of SiC and a flange 4 is formed at an outside end. The furnace core tube 1 is connected to a junction tube 6 made of quartz glass through an Si rubber packing 5 to fix with a clasp 7. In this composition, thermal expansion at a junction section will be avoided and gas leakage will also be prevented by a complete seal. Furthermore, easy operation is attained because of the possibility of shortening the end section.