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发明名称
SPINNER
摘要
申请公布号
JPS5644066(A)
申请公布日期
1981.04.23
申请号
JP19790119242
申请日期
1979.09.19
申请人
FUJITSU LTD
发明人
FUJIMURA SHIYUUZOU;YASUDA ATSUYUKI
分类号
B05C11/08;G03F7/16;H01L21/027
主分类号
B05C11/08
代理机构
代理人
主权项
地址
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